Available Models If you would like to request a quote, please indicate the number of standards you'd like for each model. Click on the button to add these items to your quote basket. Model No. Wafer Diameter Nominal Step Height Part Number Quantity SHS8-80 200 mm 8 nm 973_VLSI SHS8-180 200 mm 18 nm 974_VLSI SHS8-440 200 mm 44 nm 975_VLSI SHS8-880 200 mm 88 nm 976_VLSI SHS8-1800 200 mm 180 nm 977_VLSI SHS8-4500 200 mm 450 nm 978_VLSI SHS8-9400 200 mm 940 nm 979_VLSI SHS8-1.8 200 mm 1.8 µm 966_VLSI SHS8-4.5 200 mm 4.5 µm 1480_VLSI SHS8-8 200 mm 8 µm 967_VLSI SHS8-14.5 200 mm 14.5 µm 1481_VLSI SHS8-24 200 mm 24 µm 968_VLSI SHS8-19.5 200 mm 19.5 µm 1482_VLSI SHS8-50 200 mm 50 µm 969_VLSI SHS8-100 200 mm 100 µm 970_VLSI SHS12-80 300 mm 8 nm 980_VLSI SHS12-180 300 mm 18 nm 981_VLSI SHS12-440 300 mm 44 nm 982_VLSI SHS12-880 300 mm 88 nm 983_VLSI SHS12-1800 300 mm 180 nm 960_VLSI SHS12-4.5 300 mm 4.5 µm 1483_VLSI SHS12-4500 300 mm 450 nm 961_VLSI SHS12-14.5 300 mm 14.5 µm 1484_VLSI SHS12-9400 300 mm 940 nm 962_VLSI SHS12-1.8 300 mm 1.8 µm 984_VLSI SHS12-19.5 300 mm 19.5 µm 1485_VLSI SHS12-24 300 mm 24 µm 986_VLSI SHS12-8 300 mm 8 µm 985_VLSI SHS12-50 300 mm 50 µm 987_VLSI SHS12-100 300 mm 100 µm 988_VLSI Autoload Recertification Any Any N/A

Model Number Information for Autoload Step Height Standards