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Model Number Information for Silicon Nitride Film Thickness
NFTS is an acronym for Nitride Film Thickness Standards. NFTS are available in 4, 5, 6 and 8 inch versions.
The wafer size is added to the model number after the NFTS. For example, NFTS8-XXXX.
The nominal thickness of the film in angstroms completes the model number.
Silicon Nitride Film Thickness Standards are traceable to SI units through NIST.