Application: Step Height Calibration Equipment: Profilers and Atomic Force Microscope (AFM) Features: "Thin" Step Height < 1µm: Silicon Dioxide (not compatible with optical profiler) "Thick" Step Height > 1 µm: Silicon (compatible with optical and mechanical profiler) Traceability: SI units through NIST Product Range: 80 Å to 100 µm Wafer Diameter Step Height (Å) 200 mm 300 mm 80 SHS8-80 SHS12-80 180 SHS8-180 SHS12-180 440 SHS8-440 SHS12-440 880 SHS8-880 SHS12-880 1,800 SHS8-1800 SHS12-1800 4,500 SHS8-4500 SHS12-4500 9,400 SHS8-9400 SHS12-9400 Step Height (µm) 200 mm 300 mm 1.8 SHS8-1.8 SHS12-1.8 8.0 SHS8-8 SHS12-8 24.0 SHS8-24 SHS12-24 50.0 SHS8-50 SHS12-50 100.0 SHS8-100 SHS12-100