Dimensional Products
AutoLoad Surface Topography Standards (ALSTS)

ALSTS microscope calibration standard
Above is the Autoload Surface Topography Standard, with 5 distinct pitch clusters.

3D SPM MEASUREMENTS THAT STAND OUT. The AutoLoad Surface Topography Standard (ALSTS) uses a combination of step height and pitch to enable three-dimensional calibration of optical interferometric microscopes and Atomic Force Microscopes. Multiple pitch gratings take microscope calibration standard further, allowing characterization of scan linearity. On high resolution products such as the Atomic Force Microscope, traceable calibration standard can be achieved, driving your microscope to its full potential.

AutoLoad Surface Topography Standards (ALSTS) Product Description

The ALSTS dimensional product consists of 5 pitch clusters of varying dimension patterned in a layer of silicon dioxide and coated with Chromium for optimum contrast. The center cluster is certified and traceable, while the remaining clusters are for daily use monitors to extend the life of the microscope calibration standard.

Each pitch cluster on the microscope calibration standard contains three distinct grid patterns spaced 100 µm apart. Each grid pattern measures approximately 270 µm x 270 µm and consists of an array of alternating bars and spaces with pitch in both X and Y directions. Each product model comes standard with 3 pitch clusters, and is available in vertical step heights of either18 nm, 44 nm, 100 nm, or 180 nm. Our manufacturing technique utilizes advanced lithography methods to obtain a very regular topographic pattern, and statistical sampling to allow accurate measurement across the entire working area of the microscope calibration standard. The Surface Topography Standard is certified and traceable for both pitch and step height.

AutoLoad Surface Topography Standards (ALSTS) Product Specifications

  • SEMI Specification Silicon Wafers
    200 mm and 300 mm

  • Materials
    Silicon Dioxide on Silicon coated with Chromium

  • Nominal Pitch Values (X and Y)
    3 µm, 10 µm, and 20 µm (all on one standard)

  • Available Nominal Heights (Z)
    18 nm, 44 nm, 100 nm, 180 nm

  • Traceability
    Pitch and Step Height: Traceable to SI Units through NIST

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