Dimensional Products
NanoCD Standards for Mask Handling Tools (NCD)

NanoCD line width standard
Above is an isometric view of a NanoCD 70 nm line, which extends to 3 mm total certified length.
Mounted NanoCD for line width calibration
The NanoCD is shown mounted into a 6" x 6" x ¼" aluminum carrier.

STAY IN LINE WITH SUB-100 NM ACCURACY CALIBRATION. The NanoCD™ (NCD) is the first commercially available calibration standard to provide line width accuracy calibration at the 130 nm, 90 nm and 45 nm nodes. Use this line width accuracy calibration standard for tool matching, calibrating the line width CD-AFM tip or diagnostics in a CD-SEM, and prevent bias from ever leaving the mask shop.

NanoCD Standards for Mask Handling Tools (NCD) Product Description

The VLSI Standards NanoCD, providing line width accuracy calibration, consists of a small chip containing a single isolated line 4 mm long (3 mm long), offering thousands of distinct measurement sites. Chips are fabricated at VLSI Standards using a patented technique that results in lines with high uniformity and low associated uncertainty, unachievable through conventional lithography methods. For compatibility with reticle handlers, the chip is mounted to an aluminum replica of a quartz photomask.

Global alignment marks, rulers and pattern recognition features extending from the chip to the reticle ensure that the target is always located, and measurements can be repeated.

The line width accuracy calibration, or the Critical Dimension (CD), is certified with TEM and is traceable to the international system of units (SI) through the atomic lattice spacing of single crystal silicon.

NanoCD Standards for Mask Handling Tools (NCD) Product Specifications

  • Substrate
    152 mm x 152 mm x 0.25 mm Al carrier.

  • Nominal CD Values
    25 nm, 70 nm, or 110 nm.

  • Accuracy
    25 nm ± 0.5 nm,
    70 nm ± 0.7 nm, 110 ± 0.8 nm

  • Material of CD line
    Amorphous Silicon

  • Length of Line
    3 mm certified

  • Defectivity of Line
    5% Max. (150 µm of total 3,000 µm)

  • Traceability
    Traceable to the SI units through the atomic lattice spacing in the silicon crystal by TEM

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