Application: Routine check of AFM scanner performance
Equipment: Atomic Force and Optical Interformetric Microscopes
Features: Silicon Dioxide on Silicon substrate
Platinum coated (except 1800 Å model)
Traceability: Reference only (not traceable)
Product Range: Pitch, X and Y: 3 - 10 µm
Height, Z: 180 Å- 1800 Å

Feature Dimension Substrate
Pitch, X and Y (µm) Height, Z (Å) 8 mm x 8 mm
3 180 STR3-180P
3 440 STR3-440P
3 1,000 STR3-1000P
3 1,800 STR3-1800S
10 180 STR10-180P
10 440 STR10-440P
10 1,000 STR10-1000P
10 1,800 STR10-1800S

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